IMEC - an international R&D and innovation hub in nanoelectronics and digital technologies, Belgium, EU
Position: Senior Fellow at the IMEC - an international R&D and innovation hub in nanoelectronics and digital technologies, Professor at Katholieke Universiteit (KU) Leuven, Belgium
Specialization: Nanoscale materials characterization, Scanning probe microscopy, Secondary ion mass spectrometry: dynamic and static SIMS
At the NANOCON´18 conference Prof. W. Vandervorst will present the invited lecture in the Session E “Metrology for Nanoscale Complex Semiconductor Systems”.
Personal Background and Education:
Prof. dr. ir Wilfried Vandervorst received his M.Sc. degree (electronic engineering) in 1977 from the Katholieke Universiteit Leuven, Belgium and the Ph.D degree in Applied Physics in 1983 from the same University. In 1983-1984 he worked at Bell Northern Research, Ottawa, Canada as a consultant in the field of materials characterization. In 1984 he joined Imec where he became Director of the department dealing with materials characterization. Since 1990 he is also holding an appointment as a Professor at the KU Leuven (Physics Department) where he is teaching a course on materials characterization and supervising PhD students. In 2001, after an international peer review, he was elected as an Imec Fellow for his outstanding scientific achievements related to semiconductor metrology and in 2013 as Senior Imec Fellow (at present the only one at Imec).
Research focus and results:
He is engaged in advanced research on metrology and material (interactions) for semiconductor technology.
Main research topics:
Summary of publication and research activity:
He has co-authored more than 600 papers in peer-reviewed journals, gave more than 150 invited presentations and is co-inventor of more than 60 patents.